Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

Edition, 2002

Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses (Hardcover)

Fundamental Mechanisms and Application to IC Interconnect Technology

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Title Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
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Publisher
ISBN 9781402071935
Edition Edition, 2002
Number of Pages 229
Country India
Language English

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

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